Base component for a thermoprocessing system, a thermoprocessing system, and a thermoprocessing method

摘要

A base component may be uses in a thermoprocessing system that includes the base component and at least one recipient enclosure for sealing a process chamber of the thermoprocessing system from an exterior thereof. The base component includes a main hub, and the main hub includes: an energy penetration for providing a heating or cooling energy from an exterior of the process chamber to the process chamber; a media inlet penetration for transporting a media from an exterior of the process chamber to the process chamber; and a media outlet penetration for transporting a media from the process chamber to an exterior of the process chamber.