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Frequency and match tuning in one state and frequency tuning in the other state
Frequency and match tuning in one state and frequency tuning in the other state
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机译:一种状态下的频率和匹配调谐,另一种状态下的频率调谐
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摘要
Systems and methods for frequency and match tuning in one state S1 and frequency tuning in another state S2 are described. The systems and methods include determining one or more variables for the states S1 and S2, and tuning a frequency for the state S1 of a radio frequency (RF) generator based on the one or more variables.
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