首页>
外国专利>
Method and apparatus for monitoring port blockage for TDLAS measurements in harsh environments
Method and apparatus for monitoring port blockage for TDLAS measurements in harsh environments
展开▼
机译:用于在恶劣环境中监视端口阻塞以进行TDLAS测量的方法和装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method of monitoring blockage of a sight tube attached to a wall of a process chamber, the sight tube being operatively associated with a TDLAS optical head with a window between the sight tube and the TDLAS optical head. The method includes the steps of providing a photo sensor in the TDLAS optical head, the photo sensor being positioned to receive light emitted by a light emitting process within the process chamber. An emission signal produced by light emitted by the light emitting process within the process chamber being received by the photo sensor is monitored. A determination is made if the emission signal is degrading.
展开▼