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Low friction coating formed of boron-doped zinc oxide thin film and micromachine
Low friction coating formed of boron-doped zinc oxide thin film and micromachine
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机译:由掺硼氧化锌薄膜和微机械形成的低摩擦涂层
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摘要
Low friction coating of the present invention includes a boron-doped zinc oxide thin film, wherein piezoelectric polarization in a vertical direction perpendicular to a film surface and a lateral direction horizontal to the film surface occurs and a magnitude of the piezoelectric polarization in the vertical direction is within 150 pm and a magnitude of the piezoelectric polarization in the lateral direction is within 100 pm at 90% or more of measurement points. This makes it possible to greatly decrease the friction in a nanometer order.
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