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Fast and continuous eddy-current metrology of a conductive film
Fast and continuous eddy-current metrology of a conductive film
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机译:导电膜的快速连续涡流计量
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摘要
A measurement tool includes a rotation stage supporting an workpiece support, a thickness sensor overlying a workpiece support surface; a translation actuator coupled to the thickness sensor for translation of the thickness sensor relative to the workpiece support surface; and a computer coupled to control the rotation actuator and the translation actuator, and coupled to receive an output of the thickness sensor.
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