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SEMICONDUCTOR CHIP MANUFACTURING PROCESS FOR INTEGRATING LOGIC CIRCUITRY, EMBEDDED DRAM AND EMBEDDED NON-VOLATILE FERROELECTRIC RANDOM ACCESS MEMORY (FERAM) ON A SAME SEMICONDUCTOR DIE
SEMICONDUCTOR CHIP MANUFACTURING PROCESS FOR INTEGRATING LOGIC CIRCUITRY, EMBEDDED DRAM AND EMBEDDED NON-VOLATILE FERROELECTRIC RANDOM ACCESS MEMORY (FERAM) ON A SAME SEMICONDUCTOR DIE
An apparatus is described. The apparatus includes a semiconductor chip that includes logic circuitry, embedded dynamic random access memory (DRAM) cells and embedded ferroelectric random access memory (FeRAM) cells.
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