首页>
外国专利>
METHOD OF ENHANCING GENERATION EFFICIENCY OF PATTERNED OPTICAL COATING
METHOD OF ENHANCING GENERATION EFFICIENCY OF PATTERNED OPTICAL COATING
展开▼
机译:增强图案化光学镀膜的生成效率的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method of enhancing generation efficiency of patterned optical coating is disclosed. When an exposure and development process is performed after a photoresist process on the silicon wafer, a dummy pattern is formed on a scribe line around a chip as a sacrificial layer. After an optical coating process is completed, the dummy pattern from the photoresist to be removed can be selected as the starting point of a photoresist lift-off process, such that the photoresist removal can be more efficient and accurate, and the generation efficiency of patterned optical coating is enhanced.
展开▼