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Apparatus for manufacturing large scale single crystal monolayer of hexagonal boron nitride and method for manufacturing the same
Apparatus for manufacturing large scale single crystal monolayer of hexagonal boron nitride and method for manufacturing the same
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机译:用于制造六方氮化硼的大规模单晶单层的设备及其制造方法
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摘要
A method for manufacturing a large-scale single crystal monolayer of hBN including: preparing a single crystal copper substrate of (111) face in a chemical vapor deposition (CVD) apparatus; removing impurities of the single crystal copper substrate of (111) face; forming a plurality of hBN crystal seeds by depositing a vaporized ammonia borane or a vaporized borazine on the surface of the single crystal copper substrate from which the impurities are removed; and forming a large-scale single crystal monolayer of hBN grown by mutual coherence between the hBN crystal seeds, an apparatus for manufacturing the same, and a substrate for a monolayer UV graphene growth using the same.
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