首页>
外国专利>
DEDICATED CONTACTS FOR CONTROLLED ELECTROFORMING OF MEMORY CELLS IN RESISTIVE RANDOM-ACCESS MEMORY ARRAY
DEDICATED CONTACTS FOR CONTROLLED ELECTROFORMING OF MEMORY CELLS IN RESISTIVE RANDOM-ACCESS MEMORY ARRAY
展开▼
机译:电阻随机存取存储器阵列中记忆细胞控制电铸的专用触点
展开▼
页面导航
摘要
著录项
相似文献
摘要
Methods and devices are provided for fabricating a resistive random-access array having dedicated electroforming contacts. A lower conductive line is formed on an interlayer dielectric layer. A lower electrode is formed on the lower conductive line. An isolation layer is formed having an upper surface which is coplanar with an upper surface of the lower electrode. A stack structure including a metal-oxide layer and upper electrode is formed on the lower electrode. Insulating spacers are formed on sidewalls of the stack structure. The lower electrode, and stack structure form a resistive memory cell, wherein a footprint of the lower electrode is greater than that of the upper electrode. An upper conductive line contacts the upper electrode, and is arranged orthogonal to the lower conductive line. A dedicated electroforming contact contacts an extended portion of the lower electrode which extends past a cross-point of the upper and lower conductive lines.
展开▼