首页>
外国专利>
Preserving hierarchy and coloring uniformity in multi-patterning layout design
Preserving hierarchy and coloring uniformity in multi-patterning layout design
展开▼
机译:在多图案布局设计中保留层次结构和着色均匀性
展开▼
页面导航
摘要
著录项
相似文献
摘要
Layout design data is seeded with sampling markers. The sampling markers are used to determine patterning scores for patterning clusters in the layout design data, such that a patterning score corresponds to a particular coloring arrangement, and the value of a patterning score corresponds to how many of the sampling markers have a given color. Coloring arrangements are then applied to the patterning clusters based upon the patterning scores.
展开▼