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Electro-optic mach-zehnder modulator and method for fabricating an electro-optic mach-zehnder modulator

机译:电光马赫曾德尔调制器和制造电光马赫曾德尔调制器的方法

摘要

An electro-optic Mach-Zehnder modulator includes a first optical waveguide forming a first arm of the Mach-Zehnder modulator, and a second optical waveguide forming a second arm thereof. The first or second optical waveguide includes capacitive segments that are spaced apart from one another, each forming an electrical capacitor. A travelling wave electrode arrangement applies a voltage across the first or second optical waveguide. The travelling wave electrode arrangement includes waveguide electrodes arranged on the capacitive segments , an electrical line extending along a part of the first or second optical waveguide, the electrical line being arranged a distance from the waveguide electrodes, and connecting arrangements, each being assigned to one of the waveguide electrodes. Each connecting arrangement includes at least two connecting structures spaced apart from one another wherein the waveguide electrodes each are electrically connected to the electrical line via the assigned two connecting structures.
机译:电光马赫曾德尔调制器包括形成马赫曾德尔调制器的第一臂的第一光波导和形成其第二臂的第二光波导。第一或第二光波导包括彼此隔开的电容段,每个电容段形成电容器。行波电极装置在第一或第二光波导上施加电压。行波电极装置包括布置在电容段上的波导电极,沿第一或第二光波导的一部分延伸的电线,布置为与波导电极相距一定距离的电线以及连接装置,每个连接装置都分配给一个波导电极。每个连接装置包括至少两个彼此间隔开的连接结构,其中每个波导电极都通过分配的两个连接结构电连接到电线。

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