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MICROLITHOGRAPHIC FABRICATION OF STRUCTURES
MICROLITHOGRAPHIC FABRICATION OF STRUCTURES
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机译:结构的微影像学制造
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摘要
Micro- and nano-patterns in imprint layers formed on a substrate and lithographic methods for forming such layers. The layers include a plurality of structures, and a residual layer having a residual layer thickness (RLT) that extends from the surface of the substrate to a base of the structures, where the RLT varies across the surface of the substrate according to a predefined pattern.
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