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LOW-PRESSURE PLASMA CHAMBER, LOW-PRESSURE PLASMA INSTALLATION AND METHOD FOR PRODUCING A LOW-PRESSURE PLASMA CHAMBER
LOW-PRESSURE PLASMA CHAMBER, LOW-PRESSURE PLASMA INSTALLATION AND METHOD FOR PRODUCING A LOW-PRESSURE PLASMA CHAMBER
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机译:低压等离子室,低压等离子装置和制备低压等离子室的方法
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摘要
A parallelepipedal low-pressure plasma chamber body of glass is disclosed. The low-pressure plasma chamber may have electrodes at opposing sides of the low-pressure plasma chamber body. Furthermore, the low-pressure plasma chamber may have at opposing sides a door and a rear wall closure. The door and rear wall closure may in each case have at least one media connection in order to achieve a uniform gas flow in the low-pressure plasma chamber. The door may be assembled on the collar of the low-pressure plasma chamber body which extends radially away from the longitudinal axis of the low-pressure plasma chamber body. The low-pressure plasma chamber body is preferably produced using the pressing method or blow-and-blow method, in an analogous manner to industrial glass bottle production.
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