Low-pressure plasma chamber, low-pressure plasma system and method for producing a low-pressure plasma chamber

摘要

The invention relates to a preferably cuboid low-pressure plasma chamber body (14) made of glass. The invention further relates to a low pressure plasma chamber (12) having such a low pressure plasma chamber body (14). The low pressure plasma chamber (12) may have electrodes (16a, 16b) on opposite sides of the low pressure plasma chamber body (14). Furthermore, the low-pressure plasma chamber (12) on opposite sides have a door and a rear wall closure. The door and rear wall closure can each have at least one media connection in order to achieve a uniform gas flow in the low-pressure plasma chamber (12). The door may be mounted on its neck of the low pressure plasma chamber body (14) extending radially from the longitudinal axis of the low pressure plasma chamber body (14). The low-pressure plasma chamber body (14) is preferably made by a compression or blow-blow process, analogous to industrial glass bottle production.