MOVABLE BODY DRIVE METHOD AND SYSTEM, PATTERN FORMATION METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS FOR DRIVING MOVABLE BODY BASED ON MEASUREMENT VALUE OF ENCODER AND INFORMATION ON FLATNESS OF SCALE, AND DEVICE MANUFACTURING METHOD

摘要

In an exposure operation of a substrate, a controller controls first and second drive systems based on measurement information of first and second encoder systems and correction information for compensating for a measurement error of the second encoder system that occurs due to a grating section of the second encoder system, so that scanning exposure in which a mask and the substrate are each moved relative to illumination light in a first direction is performed and the measurement error is compensated for.