首页> 外国专利> SELECTIVELY CONTROLLING APPLICATION OF A SELF-ASSEMBLED MONOLAYER COATING ON A SUBSTRATE OF A DEVICE FOR FACILITATING A REDUCTION OF ADVERSE EFFECTS OF SUCH COATING ON THE DEVICE

SELECTIVELY CONTROLLING APPLICATION OF A SELF-ASSEMBLED MONOLAYER COATING ON A SUBSTRATE OF A DEVICE FOR FACILITATING A REDUCTION OF ADVERSE EFFECTS OF SUCH COATING ON THE DEVICE

机译:自组装单分子膜涂层在设备基体上的选择性控制应用,有助于减少这种涂层对设备的不良影响

摘要

Selectively controlling application of a self-assembled monolayer (SAM) coating on a substrate of a device is presented herein. A method comprises: forming a material on a first substrate; removing a selected portion of the material from a defined contact area of the first substrate; forming a SAM coating on the material and the defined contact area—the SAM coating comprising a first adhesion force with respect to the material and a second adhesion force with respect to the defined contact area, and the first adhesion force being less than the second adhesion force; removing the SAM coating that has been formed on the material; and attaching the first substrate to the second substrate—the first substrate being positioned across from the second substrate, and the SAM coating that has been formed on the defined contact area being positioned across from a bump stop of the second substrate.
机译:本文介绍了选择性控制自组装单层(SAM)涂层在设备基材上的应用。一种方法包括:在第一基板上形成材料;以及在第一基板上形成材料。从第一基板的限定的接触区域去除材料的选定部分;在材料和限定的接触面积上形成SAM涂层— SAM涂层包括相对于材料的第一粘附力和相对于限定的接触面积的第二粘附力,且第一粘附力小于第二附着力去除已在材料上形成的SAM涂层;并将第一基板附着到第二基板上;第一基板与第二基板相对放置,并且已经形成在限定的接触区域上的SAM涂层与第二基板的凸块停止件相对放置。

著录项

  • 公开/公告号US2019341305A1

    专利类型

  • 公开/公告日2019-11-07

    原文格式PDF

  • 申请/专利权人 INVENSENSE INC.;

    申请/专利号US201916387469

  • 发明设计人 BONGSANG KIM;JOE SEEGER;

    申请日2019-04-17

  • 分类号H01L21/768;H01L21/02;H01L21/8238;

  • 国家 US

  • 入库时间 2022-08-21 12:07:40

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