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Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
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机译:基于垂直传送带和高架葫芦的组合的半导体制造自动材料处理系统
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摘要
A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and at least one vertical carousel stocker having a plurality of storage bins. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route, which runs adjacent to the carousel stocker, thereby allowing the overhead hoist transport vehicle to access a WIP part directly from one of the storage bins. At least one of the storage bins includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the overhead hoist transport vehicle.
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