METHOD FOR MANUFACTURING POROUS GLASS FINE PARTICLE BODY, MANUFACTURING APPARATUS FOR POROUS GLASS FINE PARTICLE BODY, AND METHOD FOR MANUFACTURING GLASS PREFORM

摘要

A method for manufacturing a porous glass fine particle body including: forming a deposit layer of glass fine particles, generated from raw material gas including a silicon-containing organic compound, on a rotary starting member; supplying the raw material gas to a burner; switching the raw material gas to purge gas; supplying the purge gas to the burner at a first flow rate when the raw material gas is discharged from inside the burner; and switching the first flow rate to a second flow rate smaller than the first flow rate.