首页>
外国专利>
NIOBIUM TITANIUM NITRIDE THIN FILM COATINGS FOR FAR-INFARED ABSORPTION AND FILTERING
NIOBIUM TITANIUM NITRIDE THIN FILM COATINGS FOR FAR-INFARED ABSORPTION AND FILTERING
展开▼
机译:铌钛氮化物薄膜涂层,用于远红外吸收和过滤
展开▼
页面导航
摘要
著录项
相似文献
摘要
The disclosed subject matter relates to an infrared detector including a dielectric detector membrane and a NbTiN absorber coating disposed thereon, the latter being a low stress, high resistivity film or coating useful at extremely low temperatures.
展开▼