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FLEXIBLE ELECTRONICS FOR WEARABLE HEALTHCARE SENSORS
FLEXIBLE ELECTRONICS FOR WEARABLE HEALTHCARE SENSORS
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机译:穿戴式健康传感器的柔性电子
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摘要
Aspects include a method of manufacturing a flexible electronic structure that includes a metal or doped silicon substrate. Aspects include depositing an insulating layer on a silicon substrate. Aspects also include patterning a metal on a silicon substrate. Aspects also include selectively masking the structure to expose the metal and a portion of the silicon substrate. Aspects also include depositing a conductive layer including a conductive metal on the structure. Aspects also include plating the conductive material on the structure. Aspects also include spalling the structure.
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