CLASSIFICATION, SEARCH AND RETRIEVAL OF SEMICONDUCTOR PROCESSING METROLOGY IMAGES USING DEEP LEARNING/CONVOLUTIONAL NEURAL NETWORKS

摘要

A method of classifying substrates with a metrology tool is herein disclosed. The method begins by training a deep learning framework using convolutional neural networks with a training dataset for classifying image dataset. Obtaining a new image from the meteorology tool. Running the new image through the deep learning framework to classify the new image.