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HETERO-STRUCTURE-BASED INTEGRATED PHOTONIC DEVICES, METHODS AND APPLICATIONS
HETERO-STRUCTURE-BASED INTEGRATED PHOTONIC DEVICES, METHODS AND APPLICATIONS
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机译:基于异质结构的集成光子器件,方法和应用
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摘要
An integrated photonic structure and a method of fabrication includes a substrate having at least one opening disposed therein; a semiconductor stack disposed above the substrate, the semiconductor stack being, at least in part, isolated from the substrate by an opening to define a suspended semiconductor membrane; and a first doped region and a second doped region located within the suspended semiconductor membrane. The first doped region is laterally separated from the second doped region by an optically active region disposed therein that defines a waveguiding region of the integrated photonic structure.
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