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WAFER FOR EXAMINATION AND EXAMINATION METHOD OF ENERGY DISTRIBUTION
WAFER FOR EXAMINATION AND EXAMINATION METHOD OF ENERGY DISTRIBUTION
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机译:检验用晶圆和能量分布的检验方法
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摘要
There is provided a wafer for examination that is a wafer for examination with which energy distribution in a region of a light condensing spot of a laser beam with which irradiation is carried out from the upper surface side of a wafer is checked, and is a wafer for examination in which a first metal layer and a second metal layer different in specific heat or a melting point are formed over an upper surface of a wafer. In an examination method of energy distribution, the energy distribution of the laser beam is checked based on a processing mark formed in the first and second metal layers of the wafer for examination.
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