首页> 外国专利> CRACK SENSOR FOR SENSING CRACKS IN A SOLDER PAD, AND METHOD FOR PRODUCTION QUALITY CONTROL

CRACK SENSOR FOR SENSING CRACKS IN A SOLDER PAD, AND METHOD FOR PRODUCTION QUALITY CONTROL

机译:用于感测焊垫中的裂纹的裂纹传感器以及用于生产质量控制的方法

摘要

An integrated circuit includes a solder pad which includes, in a superposition of metallization levels, an underlying structure formed by a network of first regular metal tracks that are arranged for reinforcing the mechanical strength of the underlying structure and electrically connecting between an upper metallization level and a lower metallization level of the underlying structure. The underlying structure further includes a detection electrical path formed by second metal tracks passing between the first metal tracks in the metallization levels, the detection electrical path having an input terminal and an output terminal. Electrical sensing of the detection electrical path is made to supply a measurement which is indicative of the presence of cracks in the underlying structure.
机译:一种集成电路,包括焊盘,该焊盘在金属化层的叠置中包括由第一规则金属迹线的网络形成的底层结构,所述第一规则金属迹线的布置用于增强底层结构的机械强度并在上金属化层和金属层之间电连接。底层结构的金属化程度较低。底层结构还包括由在金属化层中的第一金属迹线之间穿过的第二金属迹线形成的检测电路径,该检测电路径具有输入端子和输出端子。进行检测电路径的电感测以提供指示下层结构中裂缝的存在的测量。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号