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METHOD FOR CALIBRATING MEASURING DEVICE AND CASE USED IN THE CALIBRATION METHOD

机译:校准测量设备的方法及在校准方法中使用的情况

摘要

In a method for calibrating a measuring device by using a case which includes a case main body configured to accommodate the measuring device, a restricting portion configured to restrict translation of the measuring device accommodated in the case main body and reference surfaces provided in the case main body to face the respective sensor electrodes, a plurality of detection values is acquired in a state where translation of the measuring device accommodated in the case is restricted by the restricting portion, the reference surfaces face respective sensor electrodes of the measuring device and a high frequency signal is applied to the sensor electrodes. Then, coefficients in functions used in calculating measurement values are calibrated such that the measurement values become a predetermined value.
机译:在通过使用包括用于容纳测量装置的壳体主体的壳体的校准方法,限制部被配置成限制容纳在壳体主体中的测量装置和设置在壳体主体中的基准面的平移。主体面对各个传感器电极,在通过限制部限制容纳在壳体中的测量装置的平移,基准面面对测量装置的各个传感器电极并且高频的状态下获取多个检测值。信号施加到传感器电极。然后,对用于计算测量值的函数中的系数进行校准,以使测量值变为预定值。

著录项

  • 公开/公告号US2019033103A1

    专利类型

  • 公开/公告日2019-01-31

    原文格式PDF

  • 申请/专利权人 TOKYO ELECTRON LIMITED;

    申请/专利号US201816045910

  • 发明设计人 KIPPEI SUGITA;TOMOHIDE MINAMI;

    申请日2018-07-26

  • 分类号G01D18/00;H01L21/67;H01L21/683;H01J37/32;G01D5/24;

  • 国家 US

  • 入库时间 2022-08-21 12:05:03

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