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ULTRA-COMPACT, PASSIVE, VARACTOR-BASED WIRELESS SENSOR USING QUANTUM CAPACITANCE EFFECT IN GRAPHENE

机译:利用石墨烯的量子电容效应实现超紧凑,无源,基于变量的无线传感器

摘要

An electrical device includes at least one graphene quantum capacitance varactor. In some examples, the graphene quantum capacitance varactor includes an insulator layer, a graphene layer disposed on the insulator layer, a dielectric layer disposed on the graphene layer, a gate electrode formed on the dielectric layer, and at least one contact electrode disposed on the graphene layer and making electrical contact with the graphene layer. In other examples, the graphene quantum capacitance varactor includes an insulator layer, a gate electrode recessed in the insulator layer, a dielectric layer formed on the gate electrode, a graphene layer formed on the dielectric layer, wherein the graphene layer comprises an exposed surface opposite the dielectric layer, and at least one contact electrode formed on the graphene layer and making electrical contact with the graphene layer.
机译:一种电子设备,包括至少一个石墨烯量子电容变容二极管。在一些示例中,所述石墨烯量子电容变容二极管包括绝缘体层,设置在所述绝缘体层上的石墨烯层,设置在所述石墨烯层上的电介质层,形成在所述电介质层上的栅电极以及设置在所述石墨烯量子电容上的至少一个接触电极。石墨烯层并与石墨烯层电接触。在其他示例中,石墨烯量子电容变容二极管包括绝缘体层,凹入绝缘体层中的栅电极,在栅电极上形成的介电层,在介电层上形成的石墨烯层,其中石墨烯层包括与之相反的暴露表面。介电层,以及形成在石墨烯层上并与石墨烯层电接触的至少一个接触电极。

著录项

  • 公开/公告号US2019137430A1

    专利类型

  • 公开/公告日2019-05-09

    原文格式PDF

  • 申请/专利权人 REGENTS OF THE UNIVERSITY OF MINNESOTA;

    申请/专利号US201816222660

  • 发明设计人 STEVEN J. KOESTER;

    申请日2018-12-17

  • 分类号G01N27/22;G01R27/26;H01L31/115;H01L31/08;H01L29/423;H01L29/16;H01L29/10;H01L29/93;

  • 国家 US

  • 入库时间 2022-08-21 12:05:01

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