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Via disguise to protect the security product from delayering and graphic design system (GDS) hacking and method for producing the same
Via disguise to protect the security product from delayering and graphic design system (GDS) hacking and method for producing the same
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机译:通过伪装来保护安全产品免受延迟和图形设计系统(GDS)黑客攻击的影响及其生产方法
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摘要
A method of forming a stop layer to prevent dummy vias from connecting to a metal layer and the resulting device are provided. Embodiments include forming a first metal layer in a first dielectric layer; forming a second dielectric layer over a first Nblok layer formed over the first dielectric and first metal layers; forming a third dielectric layer over the second dielectric layer and a second Nblok layer formed over a portion of the second dielectric layer; forming a via and a plurality of vias through the third and second dielectric layers down to the second and first Nblok layers, respectively; removing portions of the second and first Nblok layers through the via and the plurality of vias down to the second dielectric layer and the first metal layer, respectively; removing portions of the third dielectric layer through each via; and filling each via with a second metal layer.
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