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CRITICALITY ANALYSIS AUGMENTED PROCESS WINDOW QUALIFICATION SAMPLING
CRITICALITY ANALYSIS AUGMENTED PROCESS WINDOW QUALIFICATION SAMPLING
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机译:关键度分析增强的过程窗口资格抽样
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摘要
Techniques are provided that can select defects based on criticality of design pattern as well as defect attributes for process window qualification (PWQ). Defects are sorted into categories based on process conditions and similarity of design. Shape based grouping can be performed on the random defects. Highest design based grouping scores can be assigned to the bins, which are then sorted. Particular defects can be selected from the bins. These defects may be reviewed.
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