Process window test sampling with increased design criticality analysis

摘要

A technique for selecting defects based on criticality of design patterns as well as defect attributes for process window qualification (PWQ) is provided. Defects are sorted into categories based on process conditions and design similarity. Shape-based grouping can be performed on random defects. The highest design-based grouping score is assigned to the bin and then sorted. Certain defects can be selected from bins. These deficiencies may be examined.