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BAW RESONATOR LESS PRONE TO SPURIOUS MODES, BAW FILTER, AND MANUFACTURING METHOD
BAW RESONATOR LESS PRONE TO SPURIOUS MODES, BAW FILTER, AND MANUFACTURING METHOD
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机译:BAW谐振器不太容易选择特定的模式,BAW滤波器和制造方法
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摘要
A BAW resonator that is less prone to spurious modes comprises a bottom electrode, a top electrode, a bottom piezoelectric layer between the electrodes, a top piezoelectric layer between the bottom piezoelectric layer and the top electrode, and a conductive layer between the two piezoelectric layers.
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