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MEMS Sound Transducer, MEMS Microphone and Method for Providing a MEMS Sound Transducer
MEMS Sound Transducer, MEMS Microphone and Method for Providing a MEMS Sound Transducer
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机译:MEMS声音传感器,MEMS麦克风以及提供MEMS声音传感器的方法
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摘要
A MEMS sound transducer includes a backplate and a membrane held by an edge fixing such that the membrane is deflectable along a deflection direction toward the backplate. The MEMS sound transducer further includes an elevation element arranged between the membrane and the backplate and having a first height along the deflection direction. The MEMS sound transducer also includes a supporting structure and a spacer element arranged between the membrane and the supporting structure and having a second height along the deflection direction, the second height being greater than the first height. The supporting structure is the backplate or is a supporting element arranged opposite the backplate, such that the membrane is arranged between the backplate and the supporting element.
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