method for coating at least one surface of a solid substrate, substrate, part and use of the layer obtainable by the method

摘要

The invention relates to a method for coating at least one surface of a solid substrate with at least one layer comprising at least one ceramic compound by a suspension plasma spray (sps) technique, wherein at least one suspension of Solid particles of at least one ceramic compound are injected into a plasma jet, and then the heat jet containing the solid particle suspension is sprayed onto the substrate surface, whereby the layer comprising at least one ceramic compound is formed on the surface of the substrate; This method is characterized in that at least 90% by volume of solid particles in suspension have a larger size (referred to as d90), such as a diameter of less than 15 µm, preferably less than 10 µm, and at least 50% by weight. The volume of the solid particles is larger in size, such as a diameter (referred to as d50), not less than 1 µm. The invention also relates to a substrate coated with at least one layer obtainable by said method. The invention also relates to a part comprising said coated substrate. The invention further relates to the use of said layer to protect a solid substrate against degradation caused by contaminants such as CMOS.