VITRE SILICA AND VITRE SILICA PRODUCTION PROCESS SO OBTAINED

摘要

vitreous silica and vitreous silica production process thus obtained. This patent application for the production of vitreous silica, especially for optical components, especially lenses, used in optical lithography in the uv region comprises the adjustment of the deposition and consolidation conditions of the vad (vapor-phase axial deposition) method. ") and, indirectly, by adjusting the oh concentration and temperature variation of the preform deposition surface on which the silica nanoparticles are deposited. by the present method, the vitreous silica is made with refractive index homogeneity of 5 ppm or less, birefringence less than or equal to 2 nm / cm, uv transparency greater than or equal to 90% and excimer laser irradiation resistance without the need for homogenization treatment, thus optimizing cost and production time.