COATINGS FORMED FROM THE DEPOSITION OF PLASMA-ACTIVATED ADDUCTS.

摘要

A fluoro-organosiloxane composition, coating and process for depositing the coating. Substituted tetramethylenedisiloxane precursor at a flow rate (QsTMDSO) and perfluorinated propylene oxide precursor at a flow rate (QPFPO) are introduced into a process chamber at a flow rate ratio (QsTMDSO/QPFPO) in the range of 0.1 to 2.0 (g/(hr.sccm)). A pulsed DC voltage is applied to a substrate and a fluoro-organosiloxane coating is deposited on the substrate, wherein the coating exhibits a water contact angle in oil (WCA/O) of greater than 155°.