Volatile Barium Beta-Diketonate Polyether Adducts. Synthesis, Characterizationand Metalorganic Chemical Vapor Deposition

摘要

The 2,5,8,11,14-pentaoxaheptadecane (tetraglyme) adducts of barium complexes of1,1,1,5,5,5-hexafluoro-2,4-pentanedione (H(hfacac(), 1,1,1,-trifluoro-2,4-pentanedione (Htfacac) and 2,2,6,6-tetramethyl-3,5-heptanedione (H(thd)) have been prepared and characterized by X-ray crystallography, H and C nmr spectroscopies, melting and sublimation points, and elemental analysis. The thermal stability of the complexes is related to their solid state structure in which the coordination number around the barium atom is nine with a monocapped, twisted square prism structure. Metalorganic chemical vapor deposition experiments were performed using the 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate and 1,1,1-trifluoro-2,4-pentanedionato complex; the 2,2,6,6-tetramethyl-3,5-heptanedionate complex dissociated prior to sublimation. The as-deposited barium fluoride films were characterized by scanning electron microscopy and energy dispersive x-ray spectroscopy.