METHOD OF MANUFACTURE OF A SUBSTANCE MULTURING MEMBER, AUTHORISATION TRADER INCLUDING THE MULTURING MEMBER, METHOD OF SAMPLING THE AUTHORISATION TRADER AND ELECTRONIC SYSTEM

摘要

A method for manufacturing a filtering module (52) comprising the steps of: forming a multilayer body comprising a filter layer (104; 208; 308) of semiconductor material and having a thickness of less than 10 pm, a first structural layer (101; 212; 312) coupled to a first side of the filter layer, and a second structural layer (110; 201; 301) coupled to a second side, opposite to the first side, of the filter layer; forming a recess in the first structural layer, which extends throughout its thickness; removing selective portions, exposed through the recess, of the filter layer to form a plurality of openings (58), which extend throughout the thickness of the filter layer; and completely removing the second structural layer to connect fluidically the first and second sides of the filter layer, thus forming a filtering membrane (56) designed to inhibit passage of contaminating particles.