首页>
外国专利>
METHOD OF PRODUCTION OF A FLUIT EQUIPMENT WITH IMPROVED FLUIT EQUIPMENT AND FLUIT EQUIPMENT FREQUENCY AND FLUIT EQUIPMENT
METHOD OF PRODUCTION OF A FLUIT EQUIPMENT WITH IMPROVED FLUIT EQUIPMENT AND FLUIT EQUIPMENT FREQUENCY AND FLUIT EQUIPMENT
展开▼
机译:具有改进的排液设备的排液设备的生产方法以及排液设备的频率和排液设备
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method for manufacturing a device for ejecting a fluid, comprising the steps of: forming, in a first semiconductor wafer that houses a nozzle of the ejection device, a first structural layer; removing selective portions of the first structural layer to form a first portion of a chamber for containing the fluid; removing, in a second semiconductor wafer that houses an actuator of the ejection device, selective portions of a second structural layer to form a second portion of the chamber; and coupling together the first and second semiconductor wafers so that the first portion directly faces the second portion, thus forming the chamber. The first portion defines a part of volume of the chamber that is larger than a respective part of volume of the chamber defined by the second portion.
展开▼