HIGH VOLTAGE HIGH CURRENT VACUUM INTEGRATED CIRCUIT

摘要

A high voltage, high current vacuum integrated circuit includes a commonvacuumenclosure that includes at least two cold-cathode field emission electrontubes, andcontains at least one internal vacuum pumping means, at least one exhausttubulation,vacuum-sealed electrically-insulated feedthroughs, and internal electricalinsulation. Thecold-cathode field emission electron tubes are configured to operate at highvoltage andhigh current and interconnected with each other to implement a circuitfunction.