In an X-ray fluorescence analysis method employing a fundamental parameter (FP) method, in a prescribed theoretical intensity formula used in a reference sample theoretical intensity calculation step for obtaining a sensitivity constant, and an unknown sample theoretical intensity calculation step in an iterative calculation, the concentration ratios of each component are standardized in such a way that the total of the concentration ratios of all the components is 1, only with regard to an absorption term relating to absorption of X-rays.
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