Disclosed is a silicon-based MEMS micro loudspeaker, comprising: a silicon-based supporting member, a silicon vibrating diaphragm, and an elastic connecting member for connecting the silicon-based supporting member and the silicon vibrating diaphragm, wherein a voice coil vibrating diaphragm coil is arranged on one side of the silicon vibrating diaphragm, a driving coil is arranged on one side of the silicon-based supporting member, and the voice coil vibrating diaphragm coil and the driving coil drive the silicon vibrating diaphragm to move to produce sound by means of the interaction thereof. The silicon-based MEMS micro loudspeaker in the technical solution of the present invention generates sound by means of the interaction of current-carrying coils instead of by adopting magnetic steel, is an MEMS micro loudspeaker having a non-magnetic steel system, inherits the property of having a relatively good frequency response characteristic of the silicon-based electromagnetic MEMS micro loudspeaker, simplifies the manufacturing process, and further facilitates the achievement of non-magnetization, complanation and ultrathin properties.
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