SURFACE CHARACTERISTIC EVALUATION METHOD, SURFACE CHARACTERISTIC EVALUATION DEVICE, AND SURFACE CHARACTERISTIC EVALUATION SYSTEM

摘要

Provided are a surface characteristic evaluation method, surface characteristic evaluation device, and surface characteristic evaluation system that make it possible to accurately evaluate the surface treatment state of a specimen that has been subjected to surface treatment while taking depth direction distribution into consideration. The present invention comprises a measurement step for acquiring an impedance distribution in the depth direction of a specimen and an evaluation step for evaluating the surface treatment state of the specimen in the depth direction on the basis of the determined impedance. The evaluation step comprises: a step for preparing an untreated article, normal article, and evaluation article and creating a standard measured value group by calculating impedance ratios γ1 between the impedances of the untreated article and normal article for each frequency; a step for creating an evaluation measurement value group by calculating impedance ratios γ2 between the impedances of the untreated article and the evaluation article for each frequency; and a step for evaluating the surface treatment state of the evaluation article by comparing the standard measurement value group and evaluation measurement value group using an evaluation method selected from among area determination, peak determination, and surface area determination according to the surface treatment process.