INTEGRATED BIOCHEMICAL SENSOR BASED ON RIB OPTICAL WAVEGUIDE

摘要

An integrated biochemical sensor based on a rib optical waveguide comprises an MZI detection chip, an optical fiber support (1), a plurality of polymer cavities, and a micro-channel system which are machined on the same SOI silicon wafer as well as a photoelectric detector and a detection circuit (9) which are provided in the polymer cavities. The MZI detection chip comprises a rib optical waveguide (3), a sample pool (8), a medium tank beam splitter (2), and a medium tank beam combiner (5). An optical fiber is coupled to the rib optical waveguide (3), and the rib optical waveguide (3) is coupled to the photoelectrical detector and the detection circuit (9). Light transmitted by an input end of the rib optical waveguide (3) is split into two branch light beams by the medium tank beam splitter (2); the two branch light beams are transmitted along two waveguide arms respectively; one waveguide arm is coupled to the sample pool (8), and the light beam of the waveguide arm is subjected to phase modulation by a sample in the sample pool (8); the two light beams are combined into an output light beam by the medium tank beam combiner (5); the photoelectric detector and the detection circuit (9) detect a change of light intensity and convert same into an electrical signal, thereby implementing sample detection in the sample pool. The sensor is easy to machine, compact in structure, high in sensitivity, and low in costs.