Piezoelectric actuator, deformable mirror and method for manufacturing deformable mirror

摘要

A piezoelectric actuator (10) comprises: a first piezoelectric single crystal (111), a second piezoelectric single crystal (112), a third piezoelectric single crystal (121), a fourth piezoelectric single crystal (122) and a level connector (300), wherein the level connector (300) has a first surface and a second surface which are parallel to and opposite to each other. One end of the first piezoelectric single crystal (111) and one end of the second piezoelectric single crystal (112) are oriented in parallel and mounted apart along an edge on the first surface of the level connector (300). One end of the third piezoelectric single crystal (121) and one end of the fourth piezoelectric single crystal (122) are also oriented in parallel and mounted similarly apart but along the orthogonal edge on the second surface of the level connector (300). The piezoelectric actuator (10) has the advantages of small volume, low hysteresis and multi-degree-of-freedom control.