Piezoelectric actuator, method of manufacturing deformed mirror and deformed mirror

摘要

The piezoelectric actuator 10 includes a first piezoelectric single crystal 111, a second piezoelectric single crystal 112, a third piezoelectric single crystal 121, a fourth piezoelectric single crystal 122 and a first surface parallel to and opposed to each other, And a connecting member (300) having a connecting member (300). One end of the first piezoelectric single crystal 111 and one end of the second piezoelectric single crystal 112 are parallel to each other and are independently mounted along the edge of the first surface of the connecting member 300. One end of the third piezoelectric single crystal 121 and one end of the fourth piezoelectric single crystal 122 are also parallel to each other and similarly mounted independently along the orthogonal edges of the second surface of the connecting member 300. The piezoelectric actuator 10 has a small volume, low strain hysteresis, and is advantageous in that it can be controlled in multi-freedom.