METHOD FOR PRODUCING FILM-ATTACHED GLASS SUBSTRATE, FILM-ATTACHED GLASS SUBSTRATE, AND METHOD FOR REMOVING FILM

摘要

A method for producing a film-attached glass substrate according to the present invention is a method for producing a film-attached glass substrate composed of a glass substrate and a film formed on a main surface of the glass substrate, the method comprising a film formation step of forming a film having a film thickness of (t_f) and a film stress of (σ_f) on a glass substrate having a thickness of (t_g), a Young's modulus of (E_g), a Poisson's ratio of (ν_g) and a curvature of (κ_g), wherein the curvature of the glass substrate falls within the range satisfying formula (2) provided that the range represented by formula (1) is satisfied.