YAW–RATE SENSOR WITH A SUBSTRATE HAVING A MAIN PLANE OF EXTENT, PRODUCTION METHOD FOR A YAW–RATE SENSOR

摘要

The invention claims a yaw-rate sensor (1) with a substrate having a main plane of extent (100, 200), wherein the yaw-rate sensor (1) comprises a rotation element arrangement (10, 20), wherein the rotation element arrangement (10, 20) is designed for detecting yaw rates lying in a first main axis of extent (100) of the substrate and yaw rates lying in a second main axis of extent (200) of the substrate which is perpendicular to the first main axis of extent (100), characterized in that the yaw-rate sensor (1) has a sensor arrangement (40), wherein the sensor arrangement (40) is designed for detecting a yaw rate lying perpendicular to the main plane of extent (100, 200) of the substrate, wherein both the sensor arrangement (40) and the rotation element assembly (10, 20) can be driven with the aid of a drive arrangement (30), wherein the drive arrangement (30) is designed for driving movement along the first main axis of extent (100).