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TWO CHANNEL COSINE-THETA COIL ASSEMBLY

机译:两种通道余弦-THETA线圈组件

摘要

A coil assembly for controlling a magnetic field in a plasma chamber is provided herein. In some embodiments, the coil assembly may include a mandrel including an annular body that includes at least one upper body coolant channel and at least one lower body coolant channel, and a plurality of cooling fins disposed circumferentially about an outer diameter of the body and radially outward from the outer diameter, an inner electromagnetic cosine-theta (cos θ) coil ring including a first set of inner coils wrapped around the plurality of cooling fins in the body and configured to generate a magnetic field in a first direction, an outer electromagnetic cosine-theta (cos θ) coil ring including a second set of outer coils wrapped around the plurality of cooling fins and configured to generate a magnetic field in a second direction orthogonal to the first direction.
机译:本文提供了一种用于控制等离子体室中的磁场的线圈组件。在一些实施例中,线圈组件可包括心轴,该心轴包括:环形主体,该环形主体包括至少一个上主体冷却剂通道和至少一个下主体冷却剂通道;以及多个散热片,其围绕主体的外径沿周向且径向地设置。内部电磁余弦θ(cos θ)线圈环从外径向外,包括第一组内部线圈,该第一组内部线圈缠绕在体内的多个散热片上,并构造成在内部产生磁场在第一方向上,外部电磁余弦θ(cos θ)线圈环包括第二组外部线圈,该第二组外部线圈缠绕在多个散热片周围,并配置为在与第二方向正交的第二方向上产生磁场第一个方向。

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