METHOD OF PROCESSING DATA, METHOD OF OBTAINING CALIBRATION DATA

摘要

Methods for processing data from a metrology process and for obtaining calibration data are disclosed. In one arrangement, measurement data is obtained from a metrology process. The metrology data is applied to a target on a substrate. The metrology process comprises illuminating the target with measurement radiation and detecting radiation redirected by the target. The measurement data comprises at least a component of a detected pupil representation of an optical characteristic of the redirected radiation in a pupil plane. The method further comprises analysing the at least a component of the detected pupil representation to determine either or both of a position property and a focus property of a radiation spot of the measurement radiation relative to the target.