HYBRID FILTER HAVING AN ACOUSTIC WAVE RESONATOR EMBEDDED IN A CAVITY OF A PACKAGE SUBSTRATE

摘要

A hybrid filter having an acoustic wave resonator embedded in a cavity of a package substrate is described. In an example, a packaged system includes a package substrate having a die side and a land side opposite the die side. An active die is physically and electrically coupled to the die side of the package substrate. An acoustic wave resonator (AWR) device is in a cavity on the die side of the package substrate, the AWR device including an acoustic wave resonator (AWR) die. The AWR die includes an acoustic wave resonator wherein the AWR device is directly electrically coupled to the active die.