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HYBRID FILTER ARCHITECTURE WITH INTEGRATED PASSIVES, ACOUSTIC WAVE RESONATORS AND HERMETICALLY SEALED CAVITIES BETWEEN TWO RESONATOR DIES
HYBRID FILTER ARCHITECTURE WITH INTEGRATED PASSIVES, ACOUSTIC WAVE RESONATORS AND HERMETICALLY SEALED CAVITIES BETWEEN TWO RESONATOR DIES
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机译:混合无源滤波器,无源谐振器,声波谐振器和两个谐振器管芯之间的密封腔的混合过滤器体系结构
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摘要
Embodiments of the invention include an acoustic wave resonator (AWR) module. In an embodiment, the AWR module may include a first AWR substrate and a second AWR substrate affixed to the first AWR substrate. In an embodiment, the first AWR substrate and the second AWR substrate define a hermetically sealed cavity. A first AWR device may be positioned in the cavity and formed on the first AWR substrate, and a second AWR device may be positioned in the cavity and formed on the second AWR substrate. In an embodiment, a center frequency of the first AWR device is different than a center frequency of the second AWR device. In additional embodiment of the invention, the AWR module may be integrated into a hybrid filter. The hybrid filter may include an AWR module and other RF passive devices embedded in a packaging substrate.
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